MICROSTRUCTURE OF THIN FILMS OF TANTALUM AND ITS COMPOUNDS

By the atomic-force-microscopy method, the authors have studied the microstructure of coatings from tantalum and its compounds, which were formed on the surface of substrates from stainless steel and microscope slide by reactive magnetron sputtering. It has been established that nanostructured tantalum fi lms are characterized by the cellular structure the size of whose cells depends on the material and the physicochemical properties of the substrate surface
   
Author:  A. S. Petrovskaya, V. A. Lapitskaya, G. B. Mel′nikova, T. A. Kuznetsova, S. A. Chizhik, A. V. Zykova, and V. I. Safonov
Keywords:  tantalum fi lm, magnetron sputtering, atomic-force microscopy, microstructure, roughness
Page:  942