Volume 89, №2
DEPOSITION OF FUNCTIONAL COATINGS FROM AN ACETYLENE-CONTAINING PLASMA AT ATMOSPHERIC PRESSURE
Properties of thin coatings formed on polymer and glass substrates by plasma-enhanced chemical vapor deposition from a mixture of nitrogen with acetylene at atmospheric pressure were investigated. It was established that chemically stable transparent films with a mass ratio of fi xed carbon and nitrogen C:N ~ 2:1 are formed on the surface of these substrates. When the deposition time was increased, arrays of dendrite-like structures were formed on the substrates.
Author: F. V. Plevako, S. V. Gorbatov, P. A. Davidovich, E. M. Prikhod′ko, S. V. Shushkov, L. P. Krul′, G. V. Butovskaya, O. V. Shakhno, S. V. Gusakova, O. V. Korolik, and A. V. Mazanik
Keywords: high-frequency barrier gaseous discharge, polymerization in plasma, dicyanoacetylene, thin-film coating, dendrite-like structures
Page: 471
F. V. Plevako, S. V. Gorbatov, P. A. Davidovich, E. M. Prikhod′ko, S. V. Shushkov, L. P. Krul′, G. V. Butovskaya, O. V. Shakhno, S. V. Gusakova, O. V. Korolik, and A. V. Mazanik.
DEPOSITION OF FUNCTIONAL COATINGS FROM AN ACETYLENE-CONTAINING PLASMA AT ATMOSPHERIC PRESSURE //Journal of engineering physics and thermophysics.
. Volume 89, №2. P. 471.
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